How to Cite
Gómez Hernández, D. A., Jurado Ortiz, P. A., de la Roche Yepes, J., Ruden Muñoz, A., González, J. M., & Sequeda Osorio, F. (2010). Titanium and zirconium thin films corrosion resistance produced by DC Magnetron Sputtering. Informador Tecnico, 74. https://doi.org/10.23850/22565035.6
Abstract
Titanium nitride (TiN and TiN/Ti) and titanium zirconium nitride (TiZrN)thin films were deposited on AISI 304 and 316L stainless steels, using DC Magne-tron Sputtering, to evaluate the superficial, mechanical and corrosion resistanceproperties. X Ray Diffraction (XRD) structural analysis performed showed thatin all studied systems had f.c.c crystalline structure, with (111) bragg planepreferential orientation. The TiZrN coating shows compressive stress by theinclusion of Zr atoms in the structure of TiN and peak widening is observeddue to the presence on the film of TiN. Superficial characteristics obtained byprofilometry (roughness (Ra) and thickness) shows Ra values below 100 nm,typical of thin films obtained by this technique. The thickness obtained rangesfrom 364,50 to 580,25 nm.
Using nanoindentation, hardness values TiN, TiN/Ti and TiZrN of 16,173,18,524 and 17,307 Gpa were obtained for thin films respectively. Corrosion resistance evaluation (Tafel Polarization), shows a decreasein corrosion speed of steel when the surface is protectedby a coating, fact which was determined by the reductionof the corrosion rate.
References
AHN, S. H.; LEE, J. H.; KIM, J. G. and HAN, J. G. Localized corrosion mechanisms of the multilayered coatings related to growth defects. En: Surface and Coatings Technology. Vol.177–178 (Ene., 2004); p. 638–644
https://doi.org/10.1016/s0257-8972(03)00939-3
AUGER, M. A.; ARAIZA, J. J.; FALCONY, C.; SÁNCHEZ, O. and ALBELLA, J. M. Hardness and tribology measurements on ZrN coatings deposited by reactive sputtering technique. En: Vacuum. Vol 8, No. 11-12 (Agos., 2007); p. 1462–1465.
https://doi.org/10.1016/j.vacuum.2007.04.009
BOBZIN, K.; BAGCIVAN, N.; GOEBBELS, N.; YILMAZ, K.; HOEHN, R.; MICHAELIS, K. and HOCHMANN, M. Lubricated PVD CrAlN and WC/C coatings for automotive applications. En: Surface & Coatings Technology. Vol. 204, No. 6-7 (Dic., 2009); p, 1097–1101.
BOUZAKIS, K.-D.; GERARDIS, S.; KATIRTZOGLOU, G.; MAKRIMALLAKIS, S.; MICHAILIDIS, N. y LILI, E. Increasing tool life by adjusting the milling cutting conditions according to PVD films' properties. En: Manufacturing Technology. Vol 57, No.1 (2008); p.105–108.
CHENG-HSUN HSU; MING-LI CHEN and KUEI-LAING LAI. Corrosion resistance of TiN/TiAlN-coated ADI by cathodic arc deposition. En: Materials Science and Engineering. Vol. 421, No. 1-2 (Apr., 2006) 182–190.
https://doi.org/10.1016/j.msea.2005.12.014
CHOI, IN. S. and PARK, J. C. The corrosion behavior of TiAlN coatings prepared by PVD in a hydrofluoric gas atmosphere. En: Surface and Coatings Technology. Vol. 131, No. 1-3 (Sep., 2000); p. 383-385.
https://doi.org/10.1016/S0257-8972(00)00767-2
CHUN-SHENG REN; ZONG-XIN MU; YOU-NIAN WANG and HUNG YU. Corrosion behavior of TiN films prepared by vacuum arc deposition and nitrogen ion beam dynamic mixing implantation. En: Surface & Coatings Technology. Vol 185, No 2-3 (Jul., 2004); p. 210– 214
https://doi.org/10.1016/j.surfcoat.2003.12.030
Cotrut, C. M.; Vladescu, A.; Antoniac, I.; Kiss, A.; Zamfir, R.; Zoita, C. N.; Braic, M. and Braic, V. Corrosion resistance of the biocompatible nitride and carbide thin films.En: European Cells and Materials. Vol. 13, No. 3 (2007); p. 34.
DE LA ROCHE, J. Influencia del Espesor de la Intercapa en las Propiedades del TiN Producido por Magnetrón Sputtering Reactivo. 2010. Trabajo de grado (Ingienería de Materiales). Universidad del Valle.
DENG JIANXIN; LIU JIANHUA; ZHAO JINLONG; SONG WENLONG and NIU MING. Friction and wear behaviors of the PVD ZrN coated carbide in sliding wear tests and in machining processes. En: Wear. Vol. 264, No. 3-4 (Feb., 2008); p. 298–307.
https://doi.org/10.1016/j.wear.2007.03.014
DEVIA, D. M.; RESTREPO, J.; RUDEN, A.; GONZÁLEZ, J. M.; SEQUEDA, F. and ARANGO, P. J. The Tribological Characteristics of TiN, TiC, TiC/TiN Films Prepared by Reactive Pulsed Arc Evaporation Technique. En: Society of Vacuum oaters Vol. 505 (2009); p. 856-7188.
DEVIA; BENAVIDES, V.; RESTREPO, E.; ARIAS, D. F. and OSPINA, R. Influence substrate temperature on structural properties of TiN/TiC bilayers produced by pulsed arc techniques. En: Vacuum. Vol. 81 (2006); p. 378–384.
https://doi.org/10.1016/j.vacuum.2006.06.006
Ferreira, E. A.; Rocha-Filho, R. C.; Biaggio, S. R. and Bocchi, N. Corrosion resistance of the Ti–50Zr at.% alloy after anodization in different acidic electrolytes . En: Corrosion Science, article in press. (2003).
GEETHA, M.; SINGH, A. K.; ASOKAMANI, R. and GOGIA, A. K. Ti based biomaterials, the ultimate choice for orthopaedic implants – A review. En: Progress in Materials Science. Vol. 54, No. 3 (May., 2009); p. 397–425.
Hollstein, F.; Kitta, D.; Louda, P.; Pacal, F. and Meinhardt, J. Investigation of low-reflective ZrCN–PVD-arc coatings for application on medical tools for minimally invasive surgery. En: Surface and Coatings Technology. Vol 142-144 (Jul., 2001); p. 1063-1068.
https://doi.org/10.1016/S0257-8972(01)01222-1
JIA-HONG HUANG; CHI-HSIN HO and GE-PING YU. Effect of nitrogen flow rate on the structure and mechanical properties of ZrN thin films on Si(1 0 0) and stainless steel substrates. En: Materials Chemistry and Physics. Vol. 102, No. 1 (Mar., 2007); p. 31-38.
https://doi.org/10.1016/j.matchemphys.2006.10.007
JIA-HONG HUANG; FAN-YI OUYANG and GE-PING YU.Effect of film thickness and Ti interlayer on the structure and properties of nanocrystalline TiN thin films on AISI D2 steel. En: Surface & Coatings Technology. Vol 201, No 16-17 (May., 2007); p. 7043–7053.
JIA-YANG CHEN; GE-PING YU and JIA-HONG HUANG. Corrosion behavior and adhesion of ion-plated TiN films on AISI 304 steel. En: Materials Chemistry and Physics. Vol. 65, No.3 (Ago., 2000); p. 310–315
JURADO, P. A. Deposición y caracterización en películas delgadas de nitruros a base de titanio y circonio mediante técnicas PVD. 2010. Trabajo de grado (Ingeniería de Materiales). Universidad del Valle.
Kelesoglu, E.; Mitterer, C. and Urgen, M. Corrosion characteristics of plain carbon steel coated with TiN and ZrN under high-flux ion bombardment. En: Surface and Coatings Technology. Vol. 160, No. 1 (Oct., 2002); p. 82–86.
https://doi.org/10.1016/S0257-8972(02)00358-4
Larijani, M. M.; Norouzian, SH.; Afzalzadeh, R.; Balashabadi, P. and Dibaji, H. Effects of post annealing on micro and nanostructural properties of ZrN films prepared by ion beam sputtering technique on SS304. En: Surface & Coatings Technology. Vol 203, No. 17-18 (Jun., 2009); p. 2486–2489.
https://doi.org/10.1016/j.surfcoat.2009.02.060
LIU CHENGLONG; YANG DAZHI; LIN GUOQIANG and QI MIN. Corrosion resistance and hemocompatibility of multilayered Ti/TiN-coated surgical AISI 316L stainless steel. En: Materials Letters. Vol. 59, No. 20-30 (Dic., 2005); p. 3813 – 3819.
Murcia, A.; Ruden, A.; Neira, A.; González, J. M.; Castro, I.; Brulh, S. and Sequeda, F. Tribological Properties of Duplex Coating Applied in Chrome Based Steel. En: Society of Vacuum Coaters. Vol. 505 (2009); p.856-7188.
PINEDA, P.; ARIAS, D. F., PULZARA, A.; DEVIA, A.; ARANGO, Y. and ARROYAVE, M. Crecimiento y caracterización de recubrimientos con bicapa Zr/Zrn. En: Revista Colombiana de Física. Vol. 34, No. 1 (2002); p. 119-121.
Riascos, H.; Franco, L. M. and Perez, J. A. Crecimiento de películas delgadas de nitruro de carbon por deposición con arco pulsado En: Scientia Et Technica a-o XIII. No 36 (Sep.2007): p 125-128.
SZUTKOWSKA, M. Strengthening of hardmetal inserts for cutting tools through heat treatment and surface modifications (PVD, CVD coatings). En: Journal of Materials Processing Technology. Vol 92-93 (Ago., 1999); p 355-359.
TUNG-SHENG YEH; JENN-MING WU; LONG-JANG HU; TUNG-SHENG YEH; JENN-MING WU and LONG-JANG HU. The properties of TiN thin films deposited by pulsed direct current magnetron sputtering. En: Thin Solid Films. Vol. 516, No. 21 (Sep., 2008); p. 7294–7298.
https://doi.org/10.1016/j.tsf.2008.01.001
Viswanathan S. SAJI and HAN CHEOL CHOE. Electrochemical corrosion behaviour of nanotubular Ti–13Nb–13Zr alloy in Ringer's solution. En: Corrosion Science. Vol 51, No. 8 (Ago. 2009); p. 1658–1663.
Wang, H. W. and Stack, M. M. Erosion of PVD TiN coatings under simultaneous corrosion in sodium carbonate/bicarbonate buffer slurries containing alumina particles. En: Surface and Coatings Technology. Vol. 106, No 1 (Jul., 1998); p. 1–7.
https://doi.org/10.1016/S0257-8972(98)00463-0
YUNCHANG XIN, CHENGLONG LIU, KAIFU HUO, GUOYI TANG, XIUBO TIAN and PAUL K. CHU. Corrosion behavior of ZrN/Zr coated biomedical AZ91 magnesium alloy. En: Surface & Coatings Technology. Vol. 203, No. 17-18 (Jun., 2009); p. 2554–2557
https://doi.org/10.1016/j.surfcoat.2009.02.074
Zhao, ZS.; Tokei, A.; Haider, S. and DEMUYNCK. Failure mechanisms of PVD Ta and ALD TaN barrier layers for Cucontact applications. En: Microelectronic Engineering. Vol. 84, No. 11 (Nov., 2007); p. 2669–2674.
Downloads
Download data is not yet available.
