Keywords
Magnetron sputtering
multilayer system
hard coatings pulverización catódica
sistema multicapas
recubrimientos duros
multilayer system
hard coatings pulverización catódica
sistema multicapas
recubrimientos duros
How to Cite
Bejarano Gaitan, G., Caicedo A., J. C., Caicedo R., J. M., & Balogh S. Gottschalk, A. G. (2007). Increase of the mechanical properties of titanium nitride by the application of a cathodic spray deposited multilayer system. Informador Tecnico, 71, 6–11. https://doi.org/10.23850/22565035.774
Abstract
TiN/TiAIN multilayer were deposited by means of d.c. reactive Magnetron Sputtering technique using titanium and aluminum targets with 10 cm in diameter and 99.99% purity in an argon/nitrogen atmosphere, applied at a substrate temperature of 300°C, and a pressure of 7x103 mbar. Silicon with orientation (100) and steel AISI M2 were utilized as substrate. The present study aimed at two main goals: to analyze the influence of aluminum content on the hardness of TiAIN coatings and the behavior of TiN/TiAIN coating's mechanical properties as a function of multilayer number. For this purpose, the chemical composition of the coatings were determined by EDX spectroscopy; the crystalline structure through X-ray diffractometry (XRD) and its morphology using scanning electron microscopy (SEM). Hardness and adherence were determined by means of micro indentation and scratch techniques respectively.
References
Stefan E. (1995). Ein neuartiges Konzept von PVD Beschichtungsanlagen fur den industriellen Einsatz in Entwicklung and Produktion. Aachen: CemeCon GmbH.
Ikeda, S., Gilles, S., Chenevierf, B. (1998). Electron microscopy analysis of the microstructure of Ti. ,AI,N thin films. Thin Solid Films 315, 257-262.
Carvalho, N.J.M., Zoestbergen, E., Kooi, B.J., De Hosson, J.Th.M. (2003). Stress analysis and microstructure of PVD monolayer TiN and multilayer TiN/TiAIN coatings. Thin Solid
Films 429. 179-189.
Woo, J.H., Lee, J.K., Lee, S.R., Lee D.B. (2000). High- Temperature oxidation of TiAIN thin films deposited on a steel substrate by ion plating. Oxidation of Metals 53 (5/6), 529-537.
Braic, V., Balaceanu, M., Braic, M., Vladescu, A. (2004). Synthesis and characterization of hard layers obtained by vacuum arc technology. Romanian Reports in Physics 56 (3), 481-486.
Liu, Z.J., Shum, P.W., Shen, Y.G. (2004). Hardening mechanisms of nanocristalline Ti-Al-N solid solution films. Thin Solid Films 468, 161-166
Castanho, J.M., Vieira, M.T. (2002). Improving the cutting performance of TiAIN coatings using submicron metal interlayers. Key Engineering Materials, Vol. 230/232, 635-639.
Cselle, T., Morstein, M., Geisser, L., Holubar, P. (2003). Nanostructured coatings for high performance tools. Wetkzeug Technik, (77) 1-8.
Bejarano, G., Caicedo, J.M., Devia, A., Arango, P. Montealegre, G. (2004). Recubrimientos duros sobre herramientas de producción en serie obtenidos por Plasma Assisted Physical Vapor Deposition PAPVD (magnetrón sputtering). Revista Colombiana de Física 36(2) 325-330.
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